Diaphragm Valves for Atomic Layer Deposition—Atomic Layer Deposition (ALD) Diaphragm Valves
 Ultrahigh cycle life with high-speed actuation; Cv range from 0.27 to 0.62; Up to 392°F (200°C) capability with thermal actuators; Electronic actuator position-sensing option; Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel body; VCR®, tube butt weld, and modular surface-mount end connections